Lever based differential capacitive strain gauge with acceleration rejection
AssigneeAnalog Devices, Inc.
InventorsErdinc Tatar, William A. Clark
Life of this patent
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Abstract
Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.
Claims20
A microelectromechanical systems (MEMS) strain gauge sensor, comprising:
- a lever configured to rotate about a fulcrum;
- an anchor coupled to a first end of the lever;
- and
- a movable sense finger coupled to a second end of the lever,
- wherein the first end of the lever is closer to the fulcrum than the second end of the lever.
A microelectromechanical systems (MEMS) strain gauge sensor, comprising:
- a substrate;
- an anchor rigidly coupled to the substrate;
- an effort arm of a lever coupled to the anchor by a beam;
- a resistance arm of the lever coupled to a movable capacitive sense finger;
- and
- a fixed capacitive sense finger, wherein the movable capacitive sense finger and fixed capacitive sense finger form a sensing capacitor.
A microelectromechanical systems (MEMS) capacitive strain gauge sensor, comprising:
- a substrate;
- an anchor rigidly coupled to the substrate;
- a lever having an effort arm and a resistance arm;
- a beam rigidly coupling the anchor to the effort arm;
- a movable capacitor electrode;
- and
- a beam rigidly coupling the movable capacitor electrode to the resistance arm of the lever.
Dependencies are inferred from the claim text.