Substrate for sensing, a method of fabricating the substrate, and analyzing apparatus including the substrate

An analyzing apparatus comprising a substrate for sensing,

• wherein the substrate comprises:
• a support layer;
• a seed layer on the support layer;
• a plurality of metal nanoparticle clusters arranged on the seed layer, each of the plurality of metal nanoparticle clusters comprising a plurality of conductive metal nanoparticles, and the plurality of conductive metal nanoparticles being stacked in a three-dimensional structure;
• and
• a plurality of perforations arranged among the plurality of metal nanoparticle clusters, wherein each of the plurality of perforations transmits incident light therethrough such that the light excites conductive metal nanoparticles between an upper part of each of the plurality of metal nanoparticle clusters and a lower part of each of the plurality of metal nanoparticle clusters while the light is transmitted along each of the plurality of perforations,
• and wherein a mean size of each perforation from among the plurality of perforations defined by a mean interval between adjacent ones of the plurality of metal nanoparticle clusters is 8 nm to 20 nm.