Shape inspection device, processing device, height image processing device using characteristic points in combination with correcetion reference regions to correct height measurements

A shape inspection device comprising:

• a light projector that irradiates a measurement object relatively moving in a direction of a Y axis, which intersects with an X axis, with slit light spreading in a direction of the X axis or spot light scanning in the X-axis direction;
• a light receiver that receives reflected light from each position in the X-axis direction and outputs a light reception signal indicating a light receiving amount;
• a profile data generation unit that generates profile data of the measurement object in a plane intersecting with the Y-axis direction based on the light reception signal;
• an inspection unit that inspects a shape of the measurement object based on the profile data generated by the profile data generation unit;
• a height image generation unit that sequentially acquires the profile data of the measurement object relatively moving in the Y-axis direction and generates a height image of the measurement object based on a plurality of pieces of the sequentially acquired profile data;
• a display controller that causes a display to display the height image generated by the height image generation unit;
• and
• a setting unit that receives a setting of a correction reference region for correcting each of the pieces of profile data generated by the profile data generation unit, on the height image displayed on the display,
• wherein the height image generation unit further
• extracts a characteristic point included in the correction reference region for each of the pieces of profile data generated by the profile data generation unit, and
• corrects the height image by moving each of the pieces of profile data in a plane intersecting with a direction corresponding to the Y axis based on positions of a plurality of the extracted characteristic points.