System and apparatus having a seal member for sealing of a device under test

A device test apparatus, comprising:

• a thermal head comprising first and second loading components for applying load to a device during a test of the device, wherein the first loading component and second loading component are each positioned above the device and configured to be moveable with respect to the device and to each other loading component;
• one or more fluid channels extending through the first loading component to permit flow of fluid from an external source to a cavity positioned below the first loading component and above the device;
• a seal member arranged between the first loading component and the second loading component, the seal member engaging the first loading component and the second loading component, the seal member is adapted to directly engage the device, the first loading component and the second loading component during testing so as to apply a load against the device during testing and provide sealing around the cavity;
• a test socket adapted to connect to a die of the device during testing;
• and
• a controller adapted to drive the testing of the die through the test socket.

A method, comprising:

• positioning a seal member against a device under test to provide sealing around a cavity below a first loading component and above the device, wherein the seal member is arranged between the first loading component and a second loading component, wherein the first loading component and the second loading component are each arranged above the device and movable with respect to the device and to one another;
• moving the second loading component with respect to the first loading component at a time while the first loading component is stationary over the device under test;
• contacting directly with the seal member the device, the first loading component and the second loading component by the moving of the second loading component;
• and
• performing, during the contacting, a test operation on the device.