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US 12,000,041 B2Granted
Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
AssigneeApplied Materials, Inc.
InventorPatrick Tae
Life of this patent
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Abstract
A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber. The method further includes detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector. The method further includes aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.
Claims20
A method comprising:
- transmitting, by a light coupling device, light emitted from a light source through a window of a processing chamber directed at a reflector mounted on a liner of the processing chamber across from the window;
- focusing, by the light coupling device into a fiber optic cable, light received reflected back from the reflector along an optical path through the processing chamber and the window;
- receiving, by a spectrometer, the focused light from the fiber optic cable;
- detecting, by the spectrometer within the focused light, a first spectrum representative of a deposited film layer on the reflector;
- and
- aligning, by a first alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.
3 more elements
A method comprising:
- receiving light, by a light coupling device and along an optical path, reflected from a reflector mounted on a liner of a processing chamber;
- detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector;
- and
- aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.
1 more element
A method comprising:
- collimating and directing, using a first collimator, light from a first light source onto a reflector attached to a liner of a processing chamber;
- collimating and directing, using a second collimator, light received reflected from the reflector into a spectrometer;
- detecting, within the received light, a first spectrum representative of a deposited film layer on the reflector;
- and
- aligning, in two dimensions, the first collimator with the reflector until maximization of the light received by the second collimator.
2 more elements
Dependencies are inferred from the claim text.