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US 12,000,040 B1Granted
Cleaning anti-reflective coating process chamber parts
OwnerMichael Walach, Gregory Borutainventors
Life of this patent
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Abstract
A cleaning booth has a handheld blaster, which emits a pulsed electromagnetic wave that is produced by a wave source. A fiber-optic cable feeds the wave from the source to the blaster. An operator can aim the blaster toward a part that rests on a movable table in the booth. When the operator actuates the wave source, a radiation beam from the blaster ablates anti-reflective coating residue from the part. The cleaning operation can be performed in a same room as the anti-reflective coating process equipment.
Claims7
A method for coating ophthalmic lenses with anti-reflective coating, the method comprising:
- placing the lenses into an anti-reflective coating process chamber;
- operating the process chamber;
- removing process chamber parts from the process chamber;
- placing the process chamber parts inside an enclosure, in the same room as the process chamber, that is equipped with an electromagnetic wave source and a blaster, wherein the blaster is configured for handheld direction of electromagnetic radiation from the electromagnetic wave source into the enclosure;
- and
- bathing the process chamber parts in radiation from the electromagnetic wave source by actuating the electromagnetic wave source and handling the blaster.
3 more elements
Dependencies are inferred from the claim text.