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US 12,000,039 B1Granted
Cleaning anti-reflective coating process chamber parts
OwnerMichael Walach, Gregory Borutainventors
Life of this patent
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Abstract
A cleaning booth has a handheld blaster, which emits a pulsed electromagnetic wave that is produced by a wave source. A fiber-optic cable feeds the wave from the source to the blaster. An operator can aim the blaster toward a part that rests on a movable table in the booth. When the operator actuates the wave source, a radiation beam from the blaster ablates anti-reflective coating residue from the part. The cleaning operation can be performed in a same room as the anti-reflective coating process equipment.
Claims11
A system for coating ophthalmic lenses with anti-reflective coating, the system comprising:
- a room that contains at least:
- an anti-reflective coating process chamber;
- and
- apparatus for removing anti-reflective coating residue from anti-reflective coating process chamber parts, the apparatus comprising:
- an enclosure;
- an electromagnetic wave source;
- a trigger operable to actuate the electromagnetic wave source;
- a blaster connected to the electromagnetic wave source by a fiber-optic cable for feeding electromagnetic radiation from the electromagnetic wave source through the blaster;
- a table movably mounted within the enclosure;
- one or more motors operable for moving the table;
- and
- one or more control panels configured to control the electromagnetic wave source and/or the motors.
9 more elements
Dependencies are inferred from the claim text.