Back to results
US 11,999,890 B2Granted
Surfactants for electronics
AssigneeAdvanSix Resins & Chemicals LLC
InventorEdward Asirvatham
Life of this patent
Estimating the term…
Abstract
Pre-texturing agents, etchants, and photoresist stripping agents may be formulated to include one or more surfactants, from one or more surfactant classes, such as siloxane derivatives of amino acids that have surface-active properties.
Claims19
A formulation for an etchant, comprising:
- at least one surfactant of Formula I,
- wherein R1 and R2 may be the same or different, and comprise at least one group selected from the group consisting of C1-C6 alkyl, optionally the C1-C6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate;
- n is an integer from 1 to 12;
- the terminal nitrogen is optionally further substituted with R3, wherein R3 is selected from the group consisting of hydrogen, oxygen, hydroxyl, and C1-C6 alkyl;
- an optional counterion associated with the compound which, if present, is selected from the group consisting of chloride, bromide, and iodide;
- and
- hydrofluoric acid (HF).
4 more elements
A formulation for a photoresist stripping formulation, comprising:
- at least one surfactant of Formula I,
- wherein R1 and R2 may be the same or different, and comprise at least one group selected from the group consisting of C1-C6 alkyl, optionally the C1-C6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate;
- n is an integer from 1 to 12;
- the terminal nitrogen is optionally further substituted with R3, wherein R3 is selected from the group consisting of hydrogen, oxygen, hydroxyl, and C1-C6 alkyl;
- an optional counterion associated with the compound which, if present, is selected from the group consisting of chloride, bromide, and iodide;
- and
- an alkanolamine.
4 more elements
Dependencies are inferred from the claim text.