US 11,999,827 B2 · Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

Abstract

[Problem] To provide a polycarbosilazane making it possible to form a silicon-containing film which is bearable to acid etching, and a composition comprising the polycarbosilazane. [Means for Solution] The present invention provides a polycarbosilazane comprising a repeating unit of —[R1R2Si—(CH2)n]— and —(R3R4Si—NR5)—, wherein R1, R2, R3 and R4 are each independently a single bond, hydrogen or C1-4 alkyl; R5 is independently a single bond or hydrogen; and n is 1-2, and a composition comprising the polycarbosilazane. The present invention also provides a method for forming a silicon-containing film, comprising coating the composition above a substrate and heating.

Claims14

Dependent claims

A polycarbosilazane comprising a repeating unit represented by the following formula (1) and a repeating unit represented by the following formula (2):

wherein,
R1, R2, R3 and R4 are each independently a single bond, hydrogen or C1-4 alkyl;
R5 is independently a single bond or hydrogen;
and n is 1-2;
wherein a ratio of an integrated intensity between 1.7 and 2.2 ppm with respect to sum of an integrated intensity between 1.7 and 2.2 ppm and an integrated intensity between 1.0 and 1.6 ppm in 1H-NMR spectrum is 0.05 to 0.5;
wherein the polycarbosilazane is free of Si-Si bonds and
wherein the mass average molecular weight is 1,500 to 25,000 measured by gel permeation chromatography in terms of polystyrene.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/922,800Filed 4 May 2021

Priority

EP 201735847 May 2020

Published

US 2023/0174724 A18 Jun 2023

Granted

4 Jun 2024

Term ends

Not estimatedThe source records don’t support an estimate.

Classification5 codes

C08G 77/60
Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the…
C08G 77/62
In which all the silicon atoms are connected by linkages other than oxygen atoms: nitrogen atoms
C09D 183/16
Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing…:…
C08G
Macromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds

Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

Life of this patent

Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

Life of this patent

Abstract

Claims14