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US 11,994,566 B2Granted
Magnetic sensor and its manufacturing method
AssigneeTDK Corporation
InventorsKenzo Makino, Takafumi Kobayashi
Life of this patent
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Abstract
A magnetic sensor includes an MR element and a support member. A top surface of the support member includes an inclined portion. The MR element includes an MR element main body, a lower electrode, and an upper electrode. The lower electrode includes a first end closest to a lower end of the inclined portion and a second end closest to an upper end of the inclined portion. The MR element main body is located at a position closer to the second end than to the first end.
Claims7
A magnetic sensor comprising:
- a magnetoresistive element whose resistance changes with an external magnetic field;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the upper electrode is located on the main body,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, and
- a distance from the upper end of the inclined portion to the first end of the lower electrode is greater than a distance from the upper end of the inclined portion to the lower end of the inclined portion.
9 more elements
A magnetic sensor comprising:
- a magnetoresistive element whose resistance changes with an external magnetic field;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the upper electrode is located on the main body,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion,
- the upper electrode includes a third end closest to the lower end of the inclined portion, and
- a distance from the main body to the third end of the upper electrode is smaller than that from the main body to the first end of the lower electrode.
10 more elements
A magnetic sensor comprising:
- a magnetoresistive element whose resistance changes with an external magnetic field;
- and
- a support member that supports the magnetoresistive element, wherein
- the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface,
- the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
- the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body,
- the main body is located on the inclined portion,
- the lower electrode is interposed between the main body and the inclined portion,
- the upper electrode is located on the main body,
- the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
- the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion,
- the upper electrode includes a third end closest to the lower end of the inclined portion, and
- a distance from the upper end to the third end of the upper electrode is smaller than that from the upper end to the first end of the lower electrode.
10 more elements
Dependencies are inferred from the claim text.