Probe position monitoring structure and method of monitoring position of probe

A method of monitoring a position of a probe, comprising:

• providing a probe position monitoring structure, wherein the probe position monitoring structure comprises:
• a first common line;
• a second common line;
• and
• a contact portion, wherein the contact portion comprises:
• a first zigzag structure, wherein a first end of the first zigzag structure is directly connected with the first common line, and the first zigzag structure is extending in a horizontal direction;
• a second zigzag structure, wherein a first end of the second zigzag structure is directly connected with the first common line, a second end of the second zigzag structure is directly connected with the second common line, and the second zigzag structure is extending in the horizontal direction;
• and
• a third zigzag structure, wherein a first end of the third zigzag structure is directly connected with the second common line, and the third zigzag structure is extending in the horizontal direction;
• directly contacting the first zigzag structure extending in the horizontal direction with a first probe in a vertical direction;
• directly contacting the second zigzag structure extending in the horizontal direction with a second probe in the vertical direction;
• directly contacting the third zigzag structure extending in the horizontal direction with a third probe in the vertical direction;
• and
• performing a resistance measurement to measure a resistance of a portion of the first zigzag structure located between the first probe and the first end of the first zigzag structure, a resistance of a portion of the second zigzag structure located between the second probe and the first end of the second zigzag structure, a resistance of a portion of the second zigzag structure located between the second probe and the second end of the second zigzag structure, and a resistance of a portion of the third zigzag structure located between the third probe and the first end of the third zigzag structure.