Vibratory sensor with electronic balancing

A vibratory micro electro-mechanical system (MEMS) gyroscope with electronic balancing, the gyroscope comprising:

• a tuning fork assembly including,
• at least one pair of proof masses, each pair of proof masses including a first proof mass and a second proof mass, the first proof mass and the second proof mass able to move in opposing directions,
• a plurality of springs coupling each proof mass of the at least one pair of proof masses to a substrate, and
• at least one tunable spring having electro-thermodynamic characteristics coupled in series with one spring of the plurality of springs;
• at least one sensor configured to sense vibrations generated by the tuning fork assembly;
• and
• a steering circuit configured to selectively couple current from a power supply to each tunable spring to adjust a stiffness of at least one tunable spring based on the electro-thermodynamic characteristics of the at least one tunable spring to balance relative movement between the first and second proof masses of the at least one pair of proof masses based on an output of the at least one sensor.

A method of balancing a vibratory sensor, the method comprising:

• sensing vibrations generated by a tuning fork assembly of the vibratory sensor;
• determining if the tuning fork assembly is out of balance based on the sensed vibrations;
• and
• when it is determined that the tuning fork assembly is out of balance, adjusting a stiffness of at least one tunable spring that couples at least one proof mass of the tuning fork assembly to a substrate based on electro-thermodynamic characteristics of the at least one tunable spring.