Back to results
US 11,994,137 B2Granted
Vacuum pump
AssigneeEdwards Japan Limited
InventorsTooru Miwata, Yoshiyuki Takai
Life of this patent
Estimating the term…
Abstract
A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.
Claims5
A vacuum pump, comprising:
- a pump portion including a base, a stationary shaft portion extending from the base, a rotor disposed on an outer peripheral side of the stationary shaft portion, and a stator disposed on the outer peripheral side of the rotor;
- a channel of an exhaust gas from the pump portion to an outlet port;
- and
- a shielding portion which suppresses contact of the exhaust gas with the stationary shaft portion in the channel, wherein
- an end portion of the shielding portion has a surface opposed to a surface of the rotor, wherein the surface of the rotor extends radially inward from the outer peripheral side of the rotor;
- and
- wherein the base and the stationary shaft portion are thermally insulated from the stator and the shielding portion by an insulating material having first and second contact surfaces between the stator and the base.
4 more elements
Dependencies are inferred from the claim text.