Seal mechanism for load port doors

A load port door comprising:

• an interior surface;
• an exterior surface;
• an edge surface comprising a groove formed in the edge surface;
• and
• a seal coupled to the groove, wherein the seal comprises:
• a base portion configured to couple to the groove;
• a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of a frame of a load port responsive to a threshold sealing force being applied against the sealing portion;
• and
• a retaining portion substantially perpendicular to the base portion, wherein a surface of the retaining portion is configured to push against the edge surface responsive to the threshold sealing force being applied against the sealing portion.

A load port for receiving a substrate carrier comprising:

• a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are transportable between the substrate carrier and the factory interface;
• a load port door configured to substantially fill the transport opening, wherein the load port door comprises an edge surface forming a groove;
• and
• a seal coupled to the groove formed in the edge surface of the load port door, wherein the seal comprises:
• a base portion, wherein the seal is coupled to the groove of the load port door via the base portion;
• a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of the frame responsive to a threshold sealing force being applied against the sealing portion;
• and
• a retaining portion substantially perpendicular to the base portion, wherein a surface of the retaining portion is configured to push against the edge surface of the load port door responsive to the threshold sealing force being applied against the sealing portion.