Injector
AssigneeASM IP Holding B.V.
InventorsChris G. M. de Ridder, Klaas P. Boonstra, Theodorus G. M. Oosterlaken
Life of this patent
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AssigneeASM IP Holding B.V.
InventorsChris G. M. de Ridder, Klaas P. Boonstra, Theodorus G. M. Oosterlaken
Estimating the term…
An injector configured to be placed in a process chamber of a batch furnace assembly for injecting a gas into said process chamber. The injector has an elongated, tubular housing enclosing an injection chamber. The housing has a gas inlet opening for supplying a gas from a gas source to the injection chamber, at least one gas supply opening for supplying the gas from the injection chamber into the process chamber, and a circumferential wall extending in a longitudinal direction of the housing. The circumferential wall comprises a first lateral wall half and a second lateral wall half. Both lateral wall halves substantially span a length of the housing in the longitudinal direction. The first and second lateral wall halves are fastened to each other by means of mechanical fastening.
An injector configured to be placed in a process chamber of a batch furnace assembly for injecting a gas into said process chamber, the injector comprising an elongated, tubular housing enclosing an injection chamber, wherein the housing comprises:
Dependencies are inferred from the claim text.