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US 11,993,843 B2Granted
Substrate processing apparatus
AssigneeASM IP Holding B.V.
InventorsSeung Wook Kim, JuIll Lee, Won Ki Jeong, Dong Rak Jung, Hong Hyun Kim
Life of this patent
Estimating the term…
Abstract
Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.
Claims16
A cooling device comprising:
- a first partition;
- a second partition surrounding the first partition;
- a third partition surrounding the second partition;
- and
- an elongated separator extending from the first partition to the third partition by penetrating through the second partition, and separating a space between the second partition and the third partition into a first area and a second area, and separating a space between the second partition and the first partition into a third area and a fourth area,
- wherein the elongated separator comprises a body having a first surface and a second surface that are opposite surfaces facing each other in a height direction of the elongated separator, a first channel located on the first surface, a second channel located on the second surface in a lower portion of the elongated separator, a first member located in the upper portion of the elongated separator and between the second partition and the third partition, a second member located in the upper portion of the elongated separator and between the first partition and the second partition, a third member located in the lower portion of the elongated separator and between the second partition and the third partition, and a fourth member located in the lower portion of the elongated separator and between the first partition and the second partition;
- wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction,
- wherein the first channel is formed by the first member and the second member,
- wherein the second channel is formed by the third member and the fourth,
- wherein the first channel connects the first area and the third area on the upper portion of the elongated separator,
- wherein the second channel connects the second area and the fourth area on the lower portion of the elongated separator, and
- wherein the first channel and the second channel are in a skew position with respect to each other.
9 more elements
A cooling device comprising:
- a fluid channel through which a coolant circulates, the coolant being introduced through at least one inlet;
- a partition separating the fluid channel into a first area and a second area,
- an elongated separator penetrating through the partition and extending across the first area and the second area, the elongated separator comprising a body having a first surface, a second surface facing the first surface as an opposite surface of the first surface in a height direction of the elongated separator, a first channel located on the first surface in an upper portion of the elongated separator, and a second channel located on the second surface in a lower portion of the elongated separator, a first member located in the upper portion of the elongated separator and in the first area, a second member located in the upper portion of the elongated separator and in the second area, a third member located in the lower portion of the elongated separator and in the first area, and a fourth member located in the lower portion of the elongated separator and in the second area,
- wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction;
- wherein the first channel is formed by the first member and the second member;
- wherein the first channel and the second channel are in a skew position with respect to each other;
- wherein the at least one inlet introduces the coolant into the first area such that a first flow of the coolant flowing in a clockwise direction and a second flow of the coolant flowing in a counterclockwise direction are formed in the first area;
- and
- wherein the first channel of the elongated separator forms a pathway in the upper portion of the elongated separator between the first area and the second area such that one of the first flow and the second flow of the coolant is introduced from the first area into the second area and the second channel of the elongated separator forms a pathway in the lower portion of the elongated separator between the first area and the second area such that the other one of the first flow and the second flow of the coolant is introduced from the first area into the second area.
6 more elements
A cooling device comprising:
- a first partition;
- a second partition surrounding the first partition;
- a third partition surrounding the second partition;
- and
- an elongated separator extending from the first partition to the third partition by penetrating through the second partition, separating a space between the second partition and the third partition into a first area and a second area, and separating a space between the second partition and the first partition into a third area and a fourth area, the elongated separator further comprising a first member located in an upper portion of the elongated separator and between the second partition and the third partition, a second member located in the upper portion of the elongated separator and between the first partition and the second partition, a third member located in a lower portion of the elongated separator and between the second partition and the third partition, and a fourth member located in the lower portion of the elongated separator and between the first partition and the second partition;
- wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction,
- wherein a first channel is formed by the first member and the second member,
- wherein a second channel is formed by the third member and the fourth member,
- wherein the elongated separator comprises an area between the second member and the third member that blocks of a fluid in the first area from being mixed with a fluid flowing through the second channel,
- wherein the elongated separator comprises a body having a first surface and a second surface that are opposite surfaces facing each other in a height direction of the elongated separator, and
- wherein the first channel of the elongated separator connects the first area to the third area and is in a skew position with respect to the second channel.
8 more elements
Dependencies are inferred from the claim text.