Soft magnetic metal powder comprising a metal oxide covering, and electronic component

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of the element M in the metal particle and the oxidized part is atom %,
• the concentration of the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
• [M]m−[M]a is 0.4 atom % or more,
• wherein [M]a is from 0 atom % to 16.0 atom %, and
• [M]m is from 0.4 atom % to 21.0 atom %.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes at least S,
• a unit of a concentration of S in the metal particle and the oxidized part is atom %,
• the concentration of S in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
• wherein [S]m−[S]a is 0.2 atom % or more and 5.0 atom % or less.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes at least S,
• a unit of a concentration of S in the metal particle and the oxidized part is atom %,
• the concentration of S in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m,
• [S]m−[S]a is 0.2 atom % or more,
• wherein [S]a is from 0 atom % to 5.0 atom %, and
• [S]m is from 0.2 atom % to 10.0 atom %.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes S and at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
• the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
• wherein [M]m−[M]a is 0.4 atom % or more and 5.0 atom % or less,
• an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
• [S]m−[S]a is 0.2 atom % or more.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes S and at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
• the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
• [M]m−[M]a is 0.4 atom % or more,
• wherein [M]a is from 0 atom % to 16.0 atom %, and
• [M]m is from 0.4 atom% to 21.0 atom%,
• an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
• [S]m−[S]a is 0.2 atom % or more.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes S and at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
• the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
• [M]m−[M]a is 0.4 atom % or more,
• an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
• wherein [S]m−[S]a is 0.2 atom % or more and 5.0 atom % or less.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes S and at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
• the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
• [M]m−[M]a is 0.4 atom % or more,
• an average value of the concentration of S in the metal particle is expressed as [S]a,
• an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
• [S]m−[S]a is 0.2 atom % or more,
• wherein [S]a is from 0 atom % to 5.0 atom %, and
• [S]m is from 0.2 atom % to 10.0 atom %.

A soft magnetic metal powder including a plurality of soft magnetic metal particles,

• wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
• the metal particle includes at least Fe,
• the oxidized part includes at least one element M,
• the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
• a unit of a concentration of the element M in the metal particle and the oxidized part is atom %
• the concentration of the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
• wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
• an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m, and
• [M]m−[M]a is 0.4 atom % or more,
• wherein the element M is at least one kind of element M′ selected from the group consisting of Nb, Ta, W, Zr, and Hf, or
• the element M consists of Cr and at least one kind of the element M′.