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US 11,993,538 B2Granted
Opaque quartz glass and a method for producing the same
AssigneeTosoh Quartz Corporation
InventorsTakashi Taniguchi, Chiemi Ito, Takaya Suzuki, Yuka Oba
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AssigneeTosoh Quartz Corporation
InventorsTakashi Taniguchi, Chiemi Ito, Takaya Suzuki, Yuka Oba
Estimating the term…
A quartz glass provides an opaque quartz glass having high light-shielding property, excellent mechanical strength and excellent cleaning resistance against hydrofluoric acid. By setting the maximum width of the amorphous bubbles existing in the opaque quartz glass to an average of 3 to 15 μm and the density to 2.15 g/cm3 or more, the mechanical strength after baking and the cleaning resistance by hydrofluoric acid are improved. The opaque quartz glass has a whiteness at a thickness of 10 mm of 75 to 90%, the reflectance of light with a wavelength of 0.24 to 2.6 μm at a thickness of 4 mm is 60 to 85%, and the bending strength after baking is 95 MPa. In addition, a foaming agent may be mixed in the opaque quartz glass. An opaque quartz glass having cleaning resistance against acid can be obtained.
An opaque quartz glass consisting of amorphous cells, an average maximum width of the amorphous cells being 3 to 15 μm, the opaque quartz glass having a density of 2.15 g/cm3 or more, a whiteness at a 10-mm thickness of 75 to 90%, a reflectance of light having a wavelength of 0.24 to 2.6 μm at a 4-mm thickness of 60 to 85%, and a bending strength of 80 MPa or more, wherein the average of the maximum width of the amorphous cells is the average value of the maximum width of the amorphous cells observed and measured by 20 or more amorphous bubbles appearing on a cut surface of a sample with a cross-sectional scanning electron microscope.
An opaque quartz glass having a baked surface and being comprised of amorphous cells and spherical cells, the amorphous cells having an average maximum width of 3 to 15 μm,
A method of manufacturing an opaque quartz glass comprising the steps of:
Dependencies are inferred from the claim text.