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US 11,993,537 B2Granted
Substrate loading cassette and method of processing substrate using the same
AssigneeSamsung Display Co., Ltd.
InventorHyo-Seop Kim
Life of this patent
Estimating the term…
Abstract
The present disclosure describes a substrate loading cassette. The substrate loading cassette includes a first frame, a second frame, a first supporter coupled with the first frame, and a second supporter movably coupled with the first frame and disposed under the first supporter. The first supporter includes a first support bar and a plurality of first branch portions, and the second supporter includes a second support bar and a plurality of second branch portions. The second branch portions move in a second direction to adjust the spacing between the first and second supporters.
Claims12
A substrate loading cassette comprising:
- a first frame;
- a second frame facing the first frame and spaced apart from the first frame in a first direction;
- a first supporter coupled with the first frame;
- and
- a second supporter movably coupled with the first frame and disposed under the first supporter, the first supporter comprising:
- a first support bar coupled with the first frame and extending in a second direction perpendicular to the first direction;
- and
- a plurality of first branch portions protruding from the first support bar toward the second frame, the second supporter comprising:
- a second support bar coupled with the first frame and extending in the second direction;
- and
- a plurality of second branch portions protruding from the second support bar toward the second frame, wherein the plurality of second branch portions are configured to move in a direction parallel to the second direction;
- wherein none of the plurality of first branch portions overlap any of the plurality of second branch portions when viewed in a plan view from a third direction perpendicular to the first direction and the second direction.
9 more elements
A substrate loading cassette comprising:
- a first frame;
- a second frame facing the first frame and spaced apart from the first frame in a first direction;
- a first supporter coupled with the first frame;
- and
- a second supporter movably coupled with the first frame and disposed under the first supporter, the first supporter comprising:
- a first support bar coupled with the first frame and extending in a second direction perpendicular to the first direction;
- and
- a plurality of first branch portions protruding from the first support bar toward the second frame, the second supporter comprising:
- a second support bar coupled with the first frame and extending in the second direction;
- and
- a plurality of second branch portions protruding from the second support bar toward the second frame, wherein the plurality of second branch portions are configured to move in a direction parallel to the second direction;
- and
- a controller configured to move the second branch portions from a first state to a second state, wherein a maximum distance in the second direction between one first branch portion among the plurality of first branch portions and one second branch portion adjacent to the one first branch portion among the plurality of second branch portions has a first distance in the first state when viewed in a third direction perpendicular to the first direction and the second direction, the maximum distance has a second distance in the second state, and the first distance is greater than the second distance.
10 more elements
A substrate loading cassette comprising:
- a first frame;
- a second frame facing the first frame and spaced apart from the first frame in a first direction;
- a first supporter coupled with the first frame;
- and
- a second supporter movably coupled with the first frame and disposed under the first supporter, the first supporter comprising:
- a first support bar coupled with the first frame and extending in a second direction perpendicular to the first direction;
- and
- a plurality of first branch portions protruding from the first support bar toward the second frame, the second supporter comprising:
- a second support bar coupled with the first frame and extending in the second direction;
- and
- a plurality of second branch portions protruding from the second support bar toward the second frame, wherein the plurality of second branch portions are configured to move in a direction parallel to the second direction,
- wherein each of the plurality of first branch portions protrude from the first support bar to a direction that is parallel to a first crossing direction perpendicular to the first direction and the second direction, and each of the plurality of second branch portions protrude from the second support bar to a direction that is parallel to a second crossing direction perpendicular to the first crossing direction,
- wherein a distance between one first branch portion among the plurality of first branch portions and one second branch portion adjacent to the one first branch portion among the plurality of second branch portions increases going from the first frame to the second frame.
10 more elements
Dependencies are inferred from the claim text.