Actuator, liquid discharge head, and liquid discharge apparatus
AssigneeRicoh Company, Ltd.
InventorToshiaki Masuda
Life of this patent
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Abstract
An actuator includes a substrate, a diaphragm over the substrate, a lower electrode over the diaphragm, a lead titanate (PbTiO3) layer over the lower electrode, a piezoelectric body over the PbTiO3 layer, and an upper electrode over the piezoelectric body. The piezoelectric body comprises particles of lead zirconate titanate (PZT). An average diameter of the particles of the PZT is 40 nm or more. The average diameter is measured by capturing an electron backscatter diffraction image of the piezoelectric body in an image area of 20 μm×20 μm, fitting each of the particles in the image area, and determining an average value of diameters of the circles.
Claims9
An actuator comprising:
- a substrate;
- a diaphragm over the substrate;
- a lower electrode over the diaphragm;
- a lead titanate (PbTiO3) layer over the lower electrode;
- a piezoelectric body over the PbTiO3 layer, the piezoelectric body comprising particles of lead zirconate titanate (PZT);
- and
- an upper electrode over the piezoelectric body,
- wherein an average diameter of the particles of the PZT is 40 or more, where the average diameter is measured by capturing an electron backscatter diffraction image of the piezoelectric body in an image area of 20 μm×20 μm, fitting each of the particles in the image area to a circle, and determining an average value of diameters of the circles, and
- the PbTiO3 layer has a thickness of 3 nm or more and 35 nm or less.
Dependencies are inferred from the claim text.