System for adjusting pad surface temperature and polishing apparatus

A system, comprising:

• a heat exchanging member that is capable of exchanging heat with a surface of a polishing pad;
• and
• a liquid supply unit that supplies a liquid to the heat exchanging member,
• wherein the liquid supply unit comprises
• a pump device that adjusts a flow amount of a liquid flowing through a heating liquid supply line,
• a pump unit that is capable of operating on the basis of a pressure difference between a pressure of a liquid flowing through a cooling liquid supply line and a pressure of a liquid flowing through a cooling liquid returning line, and comprises at least one first pump and a first pump controller that controls operations of the at least one first pump
• a pressure regulator that is attached to the cooling liquid supply line,
• a cooling liquid supply valve attached to the cooling liquid supply line,
• a supply-side pressure sensor attached to the cooling liquid supply line, and
• a control device that controls operations of the pump device and the pump unit,
• wherein the first pump controller causes the pressure regulator to operate and controls the flow amount of cooling liquid in a case in which driving of the pump unit is stopped, and
• the pressure regulator is disposed on a downstream side of the pump unit, the cooling liquid supply valve is disposed on a downstream side of the pressure regulator, the supply-side pressure sensor is disposed on a downstream side of the cooling liquid supply valve, and the heat exchanging member is disposed on a downstream side of the supply-side pressure sensor, wherein the downstream sides and the upstream sides are with respect to a flow direction of the liquid flow through the cooling liquid supply line.

A system, comprising:

• a heat exchanging member that is capable of exchanging heat with a surface of a polishing pad;
• and
• a liquid supply unit that supplies a liquid to the heat exchanging member,
• wherein the liquid supply unit comprises
• a pump device that adjusts a flow amount of a liquid flowing through a heating liquid supply line,
• a needle valve that is attached to a cooling liquid supply line,
• a pump unit that is capable of operating on the bases of a pressure difference between a pressure of a liquid flowing through the cooling liquid supply line and a pressure of a liquid flowing through a cooling liquid returning line, wherein the pump unit comprises a pressure regulator, at least one pump, and a pump controller that controls operations of the at least one pump,
• a cooling liquid supply valve attached to the cooling liquid supply line,
• a supply-side pressure sensor attached to the cooling liquid supply line, and
• a control device that controls operations of the pump device, the needle valve, and the pump unit,
• wherein the pump controller causes the pressure regulator to operate and controls the flow amount of cooling liquid in a case in which driving of a pump unit is stopped, and
• the needle valve is disposed on a downstream side of the pump unit, the cooling liquid supply valve is disposed on a downstream side of the needle valve, the supply-side pressure sensor is disposed on a downstream side of the cooling liquid supply valve, and the heat exchanging member is disposed on a downstream side of the supply-side pressure sensor, wherein the downstream sides and the upstream sides are with respect to a flow direction of the liquid flow through the cooling liquid supply line.

A system, comprising:

• a heat exchanging member that is capable of exchanging heat with a surface of a polishing pad;
• and
• a liquid supply unit that supplies a liquid to the heat exchanging member,
• wherein the liquid supply unit comprises
• a pump device that adjusts a flow amount of a liquid flowing through a heating liquid supply line,
• a needle valve that is attached to a cooling liquid supply line,
• a pump unit that is capable of operating on the bases of a pressure difference between a pressure of a liquid flowing through the cooling liquid supply line and a pressure of a liquid flowing through a cooling liquid returning line,
• a cooling liquid supply valve attached to the cooling liquid supply line,
• a bypass line that bypasses the needle valve,
• an opening/closing valve that is attached to the bypass line, and
• a control device that controls operations of the pump device and the needle valve,
• wherein the control device executes a first control and a second control, wherein in a case in which the control device executes the first control, the control device stops the driving of the pump unit and closes the opening/closing valve, and causes the needle valve to operate to control a flow amount of the liquid to be supplied to the heat exchanging member in the small flow amount regioin;
• and in a case in which the control device executes the second control, the control device opens the opening/closing valve and fully opens the needle valve, and causes the pump unit to operate to control the flow amount of the liquid to be supplied to the heat exchanging member in the large flow amount region, and
• the cooling liquid supply valve is disposed on a downstream side of the pump unit, the bypass line and the needle valve are disposed on a downstream side of the cooling liquid supply valve, and the heat exchanging member is disposed on a downstream side of the bypass line and the needle valve, wherein the downstream sides and the upstream sides are with respect to a flow direction of the liquid flow through the cooling liquid supply line.