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US 11,992,837 B2Granted
Fluidic cavities for on-chip layering and sealing of separation arrays
AssigneeInternational Business Machines Corporation
InventorsEvan Colgan, Joshua T. Smith, Benjamin Wunsch
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Abstract
A method for fabricating a fluidic device includes depositing a sacrificial material on a pillar array arranged on a substrate. The method also includes removing a portion of the sacrificial material. The method further includes depositing a sealing layer on the pillar array to form a sealed fluidic cavity.
Claims7
A method of fabricating a fluidic device, the method comprising:
- arranging a first pillar array on a substrate, the first pillar array comprising a plurality of pillars and a plurality of extraction columns, each extraction column comprising an access opening, each extraction column further comprising an inverted U-shaped structure defined by a single slit within a sidewall of the respective extraction column that provides unidirectional slit access to an exterior of the respective extraction column;
- arranging a sealing layer on the first pillar array to form a sealed fluidic cavity;
- and
- arranging an oxide layer on the sealing layer, the oxide layer having a plurality of vent holes aligned over the plurality of extraction columns.
1 more element
Dependencies are inferred from the claim text.