Resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakaaki Kaiho, Yasuo Someya, Minoru Adegawa
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakaaki Kaiho, Yasuo Someya, Minoru Adegawa
Estimating the term…
A resist composition which generates an acid by exposure and whose solubility in a developing solution changes by the action of an acid. The resist composition contains a high-molecular-weight compound having a constitutional unit represented by General Formula (a0-1), and a high-molecular-weight compound having a constitutional unit represented by General Formula (f01-1) and a constitutional unit including an acid-dissociable group represented by General Formula (f02-r-1). In the formulas, R represents a hydrogen atom or the like; Va01 represents a divalent linking group; na01 represents an integer of 0 to 2; Ra01 is a lactone-containing cyclic group having a cyano group or the like; Vf01 represents a divalent linking group; Rf011 and Rf012 each represents a trifluoromethyl group or the like; Rf021 and Rf022 each represents an alkyl group having 1 to 3 carbon atoms; and Rf023 represents a polycyclic aliphatic hydrocarbon group
A resist composition which generates an acid by exposure and whose solubility in a developing solution changes by an action of an acid, the resist composition comprising:
Dependencies are inferred from the claim text.