Target material control in an EUV light source

A method for continuously supplying a target material in an uninterrupted manner, the method comprising:

• receiving a solid matter that includes a target material in a priming system maintained at a priming pressure and producing a fluid target material from the solid matter;
• maintaining fluid communication between a first fluid reservoir and a nozzle supply system during operation of the nozzle supply system while maintaining the first fluid reservoir at a first pressure that is greater than the priming pressure;
• and
• at least part of the time during operation of the nozzle supply system, enabling a transfer of fluid target material between the first fluid reservoir and a second fluid reservoir at the first pressure while the fluid target material is being produced in the priming system at the priming pressure.

A method comprising:

• receiving a solid matter that includes a target material in a priming system maintained at a priming pressure and producing a fluid target material from the solid matter;
• maintaining fluid communication between a first fluid reservoir and a nozzle supply system during operation of the nozzle supply system while maintaining the first fluid reservoir at a first pressure that is greater than the priming pressure;
• and
• enabling a transfer of the fluid target material between the priming system and a second fluid reservoir while fluidly isolating the first fluid reservoir and the nozzle supply system from the priming system.