Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor

A computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer, the data, comprising:

• information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device,
• wherein four information indicating whether an optimization process for measurement options of the wafer is performed comprises information about a filter optimization process,
• wherein the overlay measurement device comprises:
• a light source,
• a spectrum filter that adjusts a central wavelength and bandwidth of the beam from the light source to be suitable for acquiring an image of the first overlay mark or an image of the second overlay mark,
• a detector that acquires the image of the first overlay mark and the image of the second overlay mark,
• a transceiver, and
• a processor electrically connected to the transceiver,
• wherein the processor is configured to:
• obtain the data transmitted from the user terminal through the transceiver,
• analyze the recipe included in the data,
• when the analysis of the recipe is completed, perform optimization process for the measurement options of the water based on the recipe, and
• perform the filter optimization processor for the spectral filter.