Device for connecting a susceptor to a drive shaft
AssigneeAixtron SE
InventorsTorsten Werner Bastke, Francisco Ruda Y Witt, Mike Pfisterer
Life of this patent
Estimating the term…
Abstract
A device is provided to fasten a susceptor of a CVD reactor to a drive shaft, and by the device, the susceptor can be set into rotation. The device includes one or more of a base plate, a support plate, adjusting levers, and a flange element. The drive shaft carries the base plate, to which the support plate, which carries the susceptor, is fastened. The inclination of the support plate relative to the base plate can be adjusted by the adjusting levers. The support plate is connected to the flange element by a screw. A through opening aligned with the screw is closed with a plug.
Claims17
A device for attaching a susceptor (31) of a chemical vapor deposition (CVD) reactor to a drive shaft (40), the device comprising:
- a support plate (2) with a bearing surface (5), on which a supporting face (32) of the susceptor (31) rests;
- a flange element (4);
- a base plate (3) that is connected by the flange element (4) to the drive shaft (40);
- and
- adjustment means (16, 17, 18, 19) for adjusting an inclination of the bearing surface (5) of the support plate (2) relative to a seating face (3″) of the base plate (3),
- wherein the adjustment means (16, 17, 18, 19) comprise adjustment levers (16) each having a first lever arm (17) and a second lever arm (18) and being located between the base plate (3) and the support plate (2).
A device for attaching a susceptor (31) of a chemical vapor deposition (CVD) reactor to a drive shaft (40), the device comprising:
- a support plate (2) with a bearing surface (5), on which a supporting face (32) of the susceptor (31) rests, wherein the support plate (2) comprises gas channels (23) interconnecting gas inlet openings disposed on a lower face (2′) of the support plate (2) with gas outlet openings (24) of the bearing surface (5);
- a flange element (4);
- a base plate (3) that is connected by the flange element (4) to the drive shaft (40);
- releasable means of attachment (7, 8, 9) for attaching the base plate (3) to the flange element (4) and supporting the supporting plate (2) in an adjustable position to the base plate (3);
- and
- a seal (21) inset in a cavity (43) of an extension (42) extending from a lower face (2′) of the support plate (2), wherein the seal (21) rests on an end face of the drive shaft (40), wherein the seal (21) has gas passage openings (22) that are aligned with the gas inlet openings of the support plate (2), and wherein the seal (21) comprises a flexible material.
Dependencies are inferred from the claim text.