Method for the tracking and identification of components of lithography systems, and lithography system
AssigneeCarl Zeiss SMT GmbH
InventorsMichael Kamp-Froese, Claudia Woersching
Life of this patent
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Abstract
A method for the tracking and identification of components of lithography systems, for example of projection exposure apparatuses for semiconductor lithography is provided. The components are each provided with at least one transponder. The transponder has a data memory, on which data relating to the respective component are stored. The transponder is configured to pick up wirelessly arriving signals of a reader and to respond with data from the data memory. The data are stored on the data memory during the production of the component and/or during the production of the lithography system and/or after the start-up of the lithography system.
Claims21
A method of tracking and identifying components of a lithography system, each component comprising a transponder, each transponder comprising data memory configured to store data relating to the component, each transponder configured to wirelessly pick up arriving signals of a reader and to respond with data from its data memory, each component being a mechanical component without electrical parts and/or without a power supply, the method comprising:
- for each component, repeatedly storing the data relating to the component in the data memory of its transponder during production of the component, production of the lithography system, and/or after start-up of the lithography system.
A lithography system, comprising:
- an illumination system comprising a radiation source and an optical unit, the optical unit comprising a plurality of components, a component comprising a transponder, the transponder comprising a data memory in which data relating to the component are stored, the transponder configured to pick up wirelessly arriving signals of a reader and to respond with data from the data memory, the components being mechanical components having no electrical parts and/or having no power supply, the data having been repeatedly stored in the data memory during the production of the component, during the production of the lithography system, and/or after start-up of the lithography system.
A method of tracking and identifying components of a lithography system, each component comprising a transponder, each transponder comprising data memory configured to store data relating to the component, each transponder configured to wirelessly pick up arriving signals of a reader and to respond with data from its data memory, each component being a mechanical component without electrical parts and/or without a power supply, the method comprising:
- for each component, storing the data relating to the component in the data memory of its transponder during production of the component, production of the lithography system, and/or after start-up of the lithography system;
- and
- reading the data from the data memory during the production of the component, during the production of the lithography system, and/or after the start-up of the lithography system.
A method of tracking and identifying components of a lithography system, each component comprising a transponder, each transponder comprising data memory configured to store data relating to the component, each transponder configured to wirelessly pick up arriving signals of a reader and to respond with data from its data memory, each component being a mechanical component without electrical parts and/or without a power supply, the method comprising:
- for each component, storing the data relating to the component in the data memory of its transponder during production of the component, production of the lithography system, and/or after start-up of the lithography system;
- and
- reading out the data for at least one member selected from the group consisting of service purposes, when an overhaul occurs, when a repair occurs, when maintenance occurs, when error messages occur, during the production process to ascertain which components have already been installed, to ascertain what status the component has, to ascertain whether a specific lithography system has been provided with the associated components.
Dependencies are inferred from the claim text.