Ethynyl derived composite, a composition comprising thereof, a method for manufacturing a coating by it, and a method for manufacturing a device comprising the coating
AssigneeMerck Patent GmbH
InventorsShigemasa Nakasugi, Yusuke Hama, Hiroshi Yanagita, Takashi Sekito, Yuriko Matsuura
Life of this patent
Estimating the term…
Abstract
[Problem to be Solved] An object is to provide a compound with good heat resistance. And another object is to provide a coating made exhibits less film shrinkage, good gap filling property and good planarization. [Solution] The present invention provides an ethynyl derived composite and a composition comprising thereof. And the present invention provides a method for manufacturing a coating by it, and a method for manufacturing a device.
Claims20
A synthesis method of an ethynyl derived composite comprising;
- Reacting components
- Cy1 is a C5-6 alicyclic compound;
- Ph1 and Ph2 are each independently C6-10 aromatic hydrocarbon rings, which individually compose adjacent 2 carbons in cyclic Cy1;
- R5 and R6 are each independently hydrogen, halogen, cyano, unsubstituted C1-6 alkyl, or C1-6 alkyl substituted with at least one substituent selected from halogen and cyano;
- R8 and R9 are each independently hydrogen, unsubstituted C1-6 alkyl, C1-6 alkyl substituted with at least one substituent selected from halogen or cyano, unsubstituted C6-16 aromatic hydro carbon, C6-16 aromatic hydro carbon substituted with at least one substituent selected from halogen or cyano, unsubstituted C1-6 alkylene linking to the other portion of the ethynyl derived composite, C1-6 alkylene substituted with at least one substituent selected from halogen or cyano linking to the other portion of the ethynyl derived composite, or a direct bond bonding to the other portion of the ethynyl derived composite;
- n3 and n4 are each independently 0, 1, 2, 3 or 4;
- n5 is 0 or 1;
- Ar is each independently C6-41 aromatic hydrocarbon ring;
- R4 is each independently C1-6 alkyl, halogen or cyano;
- n1 is 1, 2, 3 or 4;
- and
- n2 is 0, 1, 2, 3 or 4;
- and obtain a precursor, and
- Replacing hydroxyl group with a group derived from ethynyl;
- where the synthesized ethynyl derived composite is a polymer.
A synthesis method of an ethynyl derived composite comprising;
- Reacting the following components
- Cy1 is a C5-6 alicyclic compound;
- Ph1 and Ph2 are each independently C6-10 aromatic hydrocarbon rings, which individually compose adjacent 2 carbons in cyclic Cy1;
- R5 and R6 are each independently hydrogen, halogen, cyano, unsubstituted C1-6 alkyl, or C1-6 alkyl substituted with at least one substituent selected from halogen and cyano;
- R8 and R9 are each independently hydrogen, unsubstituted C1-6 alkyl, C1-6 alkyl substituted with at least one substituent selected from halogen or cyano, unsubstituted C6-16 aromatic hydro carbon, C6-16 aromatic hydro carbon substituted with at least one substituent selected from halogen or cyano, unsubstituted C1-6 alkylene linking to the other portion of the ethynyl derived composite, C1-6 alkylene substituted with at least one substituent selected from halogen or cyano linking to the other portion of the ethynyl derived composite, or a direct bond bonding to the other portion of the ethynyl derived composite;
- n3 and n4 are each independently 0, 1, 2, 3 or 4;
- n5 is 0 or 1;
- Ar is each independently C6-41 aromatic hydrocarbon ring;
- R4 is each independently C1-6 alkyl, halogen or cyano;
- n1 is 1, 2, 3 or 4;
- n2 is 0, 1, 2, 3 or 4;
- and obtain a precursor, and
- Replacing hydroxyl group with a group derived from ethynyl;
- where the synthesized ethynyl derived composite is a polymer of units A and units B, where mol ratio of unit A represented by formula (1) and unit B represented by formula (2) in the ethynyl derived composite is 60:40 to 40:60;
- wherein the unit A is represented by below formula (1)
- wherein Ar, R4, n1 and n2 are each independently are defined above;
- R1 is each independently hydrogen, halogen, cyano, unsubstituted C1-6 alkyl, C1-6 alkyl substituted with at least one substituent selected from the group consisting of C1-6 alkyl, halogen and cyano, unsubstituted C3-20 aromatic ring, or C3-20 aromatic ring substituted with at least one substituent selected from the group consisting of C1-6 alkyl, halogen and cyano;
- R2 and R3 are each independently hydrogen, halogen, cyano, unsubstituted C1-6 alkyl, C1-6 alkyl substituted with at least one substituent selected from the group consisting of C1-6 alkyl, halogen and cyano, unsubstituted C3-20 aromatic ring, or C3-20 aromatic ring substituted with at least one substituent selected from the group consisting of C1-6 alkyl, halogen and cyano;
- the unit B is represented by below formula (2);
- Cy1, Ph1, Ph2, R5, R6, R8, R9, n3, n4 and n5 are each independently defined above;
- the broken straight line is a direct bond bonding to the other portion of the ethynyl derived composite;
- R7 is a direct bond bonding to the other portion of the ethynyl derived composite;
- optionally unit A concentration compared to the whole units in one ethynyl derived composite according to the invention is 30-70 mol percent, and the unit B concentration compared to the whole units in one ethynyl derived composite according to the invention is 30-70 mol percent.
Dependencies are inferred from the claim text.