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US 11,910,718 B2Granted
Multilayered piezoelectric thin film element
AssigneeXaar Technology Limited
InventorsPeter Mardilovich, Susan Trolier-McKinstry
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Abstract
A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.
Claims20
A piezoelectric thin film element comprising:
- a first electrode;
- a second electrode;
- and
- a piezoelectric thin film having a perovskite ABO3 crystal structure, the piezoelectric thin film being arranged between the first and second electrodes and in contact with the first and second electrodes,
- wherein
- the piezoelectric thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is singly doped by a first donor dopant and a second thin film layer is singly doped by a second dopant selected from one of dopant type consisting of one of donor dopants, acceptor dopants and isovalent dopants, wherein the second dopant is different from the first donor dopant;
- and
- the piezoelectric thin film is configured to be deformed upon application of a predetermined drive voltage between the first and second electrodes.
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A method for manufacturing a piezoelectric thin film element comprising:
- forming a first piezoelectric thin film layer having perovskite crystal structure (ABO3) on a first electrode;
- forming one or more piezoelectric thin film layers having the perovskite ABO3 crystal structure on the first piezoelectric thin film layer to form a laminate comprising a plurality of piezoelectric thin film layers;
- forming a second electrode on top the plurality of piezoelectric thin film layers;
- and
- coupling a controller to the first electrode and the second electrode,
- wherein:
- the first piezoelectric thin film layer is singly doped by a first donor dopant,
- a second layer of the plurality of piezoelectric thin film layers is singly doped by a second dopant different from the first donor dopant of the first thin film layer, and
- the controller is configured to apply a drive voltage that causes the plurality of piezoelectric thin film layers to deform.
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Dependencies are inferred from the claim text.