MEMS acoustic sensor

A MEMS acoustic sensor comprising:

• a substrate having a cavity;
• a back plate supported on the substrate and comprising a plurality of through holes;
• an electrode formed on an inner surface of the back plate;
• at least one anchor protruding from the back plate toward the substrate;
• a diaphragm supported by the at least one anchor, the diaphragm being deformable by a sound wave introduced through the cavity;
• and
• a plurality of connection pads exposed to an upper surface of the back plate,
• wherein the diaphragm comprises an extension extending upward along the at least one anchor from an upper surface of the diaphragm, and the plurality of connection pads comprise a first connection pad in electrical contact with an upper end of the extension and exposed to an outer surface of the back plate by passing through the back plate, and a second connection pad in electrical contact with the electrode and exposed to the outer surface of the back plate by passing through the back plate.