Resonance device

A resonance device comprising:

• a first substrate having a main surface with a recess extending therein and having an inner side wall defining the recess in the first substrate;
• a resonator including a vibration body extending in or above the recess;
• and
• a frame coupled to the first substrate and disposed around at least a part of the vibration body and having an inner side surface that faces the resonator and extends in a thickness direction of the resonance device, with the frame including a holding body arm coupled to the vibration body and an insulating film disposed above the holding body,
• wherein the inner side wall of the recess further defines a stepped planar surface that extends to the frame, and
• wherein an inner side surface of the insulating film is a first distance outside from the inner side wall defining the recess, such that the frame does not overlap or coincide with the inner side wall of the recess in the thickness direction of the resonance device.