Process for manufacturing multilayered thin film, method of manufacturing solar cell, and method for manufacturing solar cell module

Abstract

A process for manufacturing a multilayered thin film, includes: forming a photovoltaic conversion layer, comprising Cu2O as a main component, on a first transparent electrode; and placing, under a first atmosphere at an oxygen level of from 5.0×10−8 [g/L] to 5.0×10−5 [g/L] for 1 h to 1600 h, a member having the photovoltaic conversion layer formed on the first transparent electrode.

Dependencies are inferred from the claim text.