Semiconductor device with insulated gate bipolar transistor region and diode region provided on semiconductor substrate and adjacent to each other

A semiconductor device comprising:

• a semiconductor substrate having a drift layer of a first conductive type between a first main surface and a second main surface opposite to the first main surface;
• and
• an insulated gate bipolar transistor region and a diode region provided on the semiconductor substrate and adjacent to each other, wherein
• the insulated gate bipolar transistor region includes
• base layers of a second conductive type provided in a surface layer of the semiconductor substrate on a first main surface side,
• emitter layers of the first conductive type selectively provided in a surface layer of the base layer on the first main surface side,
• multiple gate electrodes provided on the first main surface side of the semiconductor substrate, aligned in a first direction extending along the first main surface, and facing the emitter layer, the base layer, and the drift layer via a gate insulating film,
• carrier injection suppression layers of the first conductive type selectively provided in the surface layer of the base layer on the first main surface side and sandwiched by the base layers in the first direction between a first pair of the gate electrodes adjacent to each other in the first direction, each carrier injection suppression layer having a respective bottom surface that is opposite to the first main surface of the semiconductor substrate, and the respective bottom surface of each carrier injection suppression layer is in direct contact with one of the base layers, and
• a collector layer of the second conductive type provided in a surface layer of the semiconductor substrate on the second main surface side,
• the diode region includes
• an anode layer of the second conductive type provided in the surface layer of the semiconductor substrate on the first main surface side, and
• a cathode layer of the first conductive type provided in a second surface layer of the semiconductor substrate on the second main surface side, and
• the insulated gate bipolar transistor region further includes
• a second pair of the gate electrodes adjacent to one another,
• a first region between the first pair of adjacent gate electrodes and including the carrier injection suppression layers, the first region being adjacent to the diode region in the first direction, and
• a second region between the second pair of gate electrodes and including plural of the base and emitter layers, the second region being separated from the diode region in the first direction and including no carrier injection suppression.