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US 11,908,918 B2Granted
Electronic device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJinseong Heo, Yunseong Lee, Sanghyun Jo, Keunwook Shin, Hyeonjin Shin
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Abstract
Provided are electronic devices and methods of manufacturing the same. An electronic device may include a substrate, a gate electrode on the substrate, a ferroelectric layer between the substrate and the gate electrode, and a carbon layer between the substrate and the ferroelectric layer. The carbon layer may have an sp2 bonding structure.
Claims8
A method of manufacturing an electronic device, the method comprising:
- preparing a substrate including a channel element;
- depositing a carbon layer on the channel element, the carbon layer having an sp2 bonding structure;
- depositing a ferroelectric layer on the carbon layer;
- depositing a gate electrode on the ferroelectric layer;
- and
- crystallizing the ferroelectric layer through an annealing process.
3 more elements
Dependencies are inferred from the claim text.