Semiconductor device having fin structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShun-Li Chen, Chung-Te Lin, Hui-Zhong Zhuang, Pin-Dai Sue, Jung-Chan Yang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShun-Li Chen, Chung-Te Lin, Hui-Zhong Zhuang, Pin-Dai Sue, Jung-Chan Yang
Estimating the term…
A method for forming a semiconductor device includes: forming a fin structure protruding from a substrate of the semiconductor device; forming a first conductive rail on the substrate, wherein a side of the first conductive rail facing the fin structure has a first recess and a second recess; forming a first conductive line in a same layer as the first conductive rail by filling a first conductive material into the first recess, wherein the first conductive line extends across the fin structure and wraps a portion of the fin structure; and forming a second conductive line in the same layer as the first conductive rail by filling a second conductive material into the second recess, wherein the second conductive line extends across the fin structure and contacts another portion of the fin structure.
A method for forming a semiconductor device, comprising:
A method for forming a transistor structure, comprising:
A method for forming a semiconductor device, comprising:
Dependencies are inferred from the claim text.