Semiconductor package, method of bonding workpieces and method of manufacturing semiconductor package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBingchien Wu, Wei-Jen Wu, Chun-Yen Lo
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBingchien Wu, Wei-Jen Wu, Chun-Yen Lo
Estimating the term…
A semiconductor package includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes a first alignment pattern having a plurality of first scale patterns arranged in a first direction. The second semiconductor device is mounted over the first semiconductor device and includes a second alignment pattern having a plurality of second scale patterns arranged in a second direction parallel to the first direction, and a scale pitch of the first scale patterns is different from a scale pitch of the second scale patterns.
A semiconductor package, comprising:
A semiconductor package, comprising:
A semiconductor package, comprising:
Dependencies are inferred from the claim text.