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US 11,908,839 B2Granted
3D semiconductor device, structure and methods with connectivity structures
AssigneeMonolithic 3D Inc.
InventorsZvi Or-Bach, Jin-Woo Han, Brian Cronquist, Eli Lusky
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Abstract
A 3D device, the device including: at least a first level including logic circuits; and at least a second level bonded to the first level, where the second level includes a plurality of transistors, where the device include connectivity structures, where the connectivity structures include at least one of the following: a. differential signaling, or b. radio frequency transmission lines, or c. Surface Waves Interconnect (SWI) lines, and where the bonded includes oxide to oxide bond regions and metal to metal bond regions.
Claims9
A 3D device, the device comprising:
- at least a first level comprising logic circuits;
- at least a second level bonded to said first level,
- wherein said second level comprises a plurality of transistors,
- wherein said device comprises connectivity structures,
- wherein said connectivity structures comprise at least one of the following:
- a. differential signaling, or
- b. radio frequency transmission lines, or
- c. Surface Waves Interconnect (SWI) lines, and
- wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions;
- and
- a plurality of vias disposed through said second level,
- wherein said plurality of vias have a circumscribed diameter of less than 2 micrometers.
9 more elements
A 3D device, the device comprising:
- at least a first level comprising logic circuits;
- and
- at least a second level bonded to said first level,
- wherein said second level comprises a plurality of transistors,
- wherein said device comprise connectivity structures,
- wherein said connectivity structures comprise at least one of the following:
- a. differential signaling, or
- b. radio frequency transmission lines, or
- c. Surface Waves Interconnect (SWI) lines
- wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions,
- wherein said device comprises a first device and a second device, each comprising said first level and said second level,
- wherein said first level comprises a substrate comprising single crystal silicon,
- wherein said first device has a substantially greater surface area than said second device, and
- wherein a layout of a portion of said second level of said second device is identical to a portion of said second level of said first device.
11 more elements
A 3D device, the device comprising:
- at least a first level comprising logic circuits;
- and
- at least a second level bonded to said first level,
- wherein said second level comprises a plurality of transistors,
- wherein said device comprises connectivity structures,
- wherein said device comprises Radio Frequency (“RF”) circuits to drive said connectivity structures,
- wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions,
- wherein said logic circuits comprise logic cells, and
- wherein said connectivity structures provide connection between said logic cells which are greater than 40 mm apart.
6 more elements
A 3D device, the device comprising:
- at least a first level comprising logic circuits;
- and
- at least a second level bonded to said first level,
- wherein said second level comprises a plurality of transistors,
- wherein said device comprises connectivity structures,
- wherein said first level comprises a substrate comprising single crystal silicon,
- wherein said substrate comprises microchannels designed for fluid cooling,
- wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions, and
- wherein said device comprises Radio Frequency (“RF”) circuits to drive said connectivity structures.
6 more elements
A 3D device, the device comprising:
- at least a first level comprising logic circuits;
- and
- at least a second level bonded to said first level,
- wherein said second level comprises a plurality of transistors,
- wherein said device comprises connectivity structures,
- wherein said first level comprises a substrate comprising single crystal silicon,
- wherein said substrate comprises microchannels designed for fluid cooling,
- wherein said bonded comprises oxide to oxide bond regions and metal to metal bond regions,
- wherein said device comprises a first device and a second device, each comprising said first level and said second level,
- wherein said first level comprises a substrate comprising single crystal silicon,
- wherein said first device has a substantially greater surface area than said second device, and
- wherein a layout of a portion of said second level of said second device is identical to a portion of said second level of said first device.
9 more elements
Dependencies are inferred from the claim text.