Semiconductor structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Yang Yu, Kuan-Lin Ho, Chin-Liang Chen, Yu-Min Liang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Yang Yu, Kuan-Lin Ho, Chin-Liang Chen, Yu-Min Liang
Estimating the term…
A method of manufacturing a semiconductor structure includes the following operations. A substrate is provided. A first conductive pillar, a second conductive pillar arid a third conductive pillar are disposed over the substrate. The first conductive pillar comprises a first height, the second conductive pillar comprises a second height, and the third conductive pillar comprises a third height. A first die is disposed over the first conductive pillar. A second die is disposed over the second conductive pillar. A first surface of the first die and a second surface of the second die are at substantially same level.
A method of manufacturing a semiconductor structure, comprising:
A method of manufacturing a semiconductor structure, comprising:
A method of manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.