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US 11,908,763 B2Granted
Apparatus having a functional structure delimited by a frame structure and method for producing same
AssigneeInfineon Technologies AG
InventorsPrashanth Makaram, John Cooper, Joerg Ortner, Stephan Pindl, Caterina Travan, Alexander Zoepfl
Life of this patent
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Abstract
An apparatus includes a semiconductor-based substrate with a functional structure that is formed in or on the semiconductor-based substrate. The apparatus includes a frame structure surrounding the functional structure and includes a coating that covers the functional structure and is delimited by the frame structure.
Claims20
A method for producing a structure, the method comprising:
- providing a semiconductor-based substrate having a functional structure that is arranged in the semiconductor-based substrate;
- arranging a frame structure in the semiconductor-based substrate such that the frame structure laterally surrounds the functional structure in the semiconductor-based substrate;
- and
- arranging over the semiconductor-based substrate an ink coating having planar upper and lower surfaces such that the ink coating covers the functional structure and is delimited by the frame structure.
1 more element
A method, comprising:
- forming a functional structure in or on a semiconductor-based substrate;
- arranging a frame structure to surround the functional structure, wherein the frame structure comprises a first vertical sidewall and a second vertical sidewall;
- and
- arranging a coating to cover the functional structure and to be delimited by the frame structure, wherein the coating comprises a carbon nanomaterial ink, wherein the coating comprises at least one first planar layer having a planar top surface and a planar bottom surface and one second planar layer having a planar bottom surface, and wherein the at least one first planar layer and one second player layer are laterally delimited by the first vertical sidewall and the second vertical sidewall.
1 more element
A method, comprising:
- forming a functional structure in a semiconductor-based substrate;
- arranging a frame structure in the semiconductor-based substrate to laterally surround the functional structure, wherein the frame structure includes a first vertical sidewall and a second vertical sidewall in the semiconductor-based substrate;
- and
- arranging a coating on the semiconductor-based substrate to cover the functional structure, the coating comprising a first planar layer having a planar top surface and a planar bottom surface and a second planar layer having a planar top surface and a planar bottom surface, wherein the first planar layer and the second planar layer are both laterally delimited by the first and the second vertical sidewalls of the frame structure.
1 more element
Dependencies are inferred from the claim text.