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US 11,908,732 B2Granted
Alternating spacers for pitch structure
AssigneeInternational Business Machines Corporation
InventorsHsueh-Chung Chen, Chanro Park, Koichi Motoyama
Life of this patent
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Abstract
A method of forming a pitch pattern is provided. The method includes forming two adjacent mandrels separated by a first distance, D1, on a substrate, and forming a first set of alternating sidewall spacers between the two adjacent mandrels. The method further includes removing the two adjacent mandrels, and forming a second set of alternating sidewall spacers and a third set of alternating sidewall spacers on opposite sides of the first set of sidewall spacers.
Claims15
A method of forming a pitch pattern, comprising:
- forming two adjacent mandrels separated by a first distance, D1, on a substrate;
- forming a first set of alternating sidewall spacers between the two adjacent mandrels;
- removing the two adjacent mandrels;
- forming a second set of alternating sidewall spacers after removing the two adjacent mandrels;
- and
- forming a third set of alternating sidewall spacers on opposite sides of the first set of sidewall spacers.
3 more elements
A method of forming a pitch pattern, comprising:
- forming two adjacent mandrels separated by a first distance, D1, on a substrate;
- forming a first sidewall spacer on opposite sides of each of the two adjacent mandrels, wherein the first sidewall spacers are made of a first material;
- removing the two adjacent mandrels;
- forming a second sidewall spacer adjoining each of the first sidewall spacers after the removing the two adjacent mandrels, where the second sidewall spacers are made of a second material different from the first material;
- forming a third sidewall spacer adjoining each of the second sidewall spacers, where the third sidewall spacers are made of the first material;
- and
- forming a fourth sidewall spacer adjoining each of the third sidewall spacers, where the fourth sidewall spacers are made of the second material.
4 more elements
Dependencies are inferred from the claim text.