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US 11,908,726 B2Granted
Method of manufacturing electrostatic chuck having electrode layer made of heterogeneous composite material, and electrostatic chuck manufactured thereby
AssigneePukyong National University Industry-University Cooperation Foundation
InventorHansang Kwon
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Abstract
This application relates to a method of manufacturing an electrostatic chuck having good characteristics in heat dissipation, thermal shock resistance, and lightness. In one aspect, the method includes preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder. The method may also include preparing an electrode layer by sintering the composite powder through spark plasma sintering (SPS), and forming a dielectric layer on the electrode layer.
Claims10
A method of manufacturing an electrostatic chuck, the method comprising:
- preparing a powdered composite material by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder;
- preparing an electrode layer by subjecting the powdered composite material to spark plasma sintering (SPS);
- forming a metal layer at least partially over the electrode layer, the metal layer comprising 1% to 5% by weight of cobalt (Co), 10% to 20% by weight of nickel (Ni), and 75% to 85% by weight of iron (Fe);
- and
- forming a dielectric layer at least partially over the electrode layer and the metal layer.
2 more elements
Dependencies are inferred from the claim text.