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US 11,908,719 B2Granted
Rounded vertical wafer vessel rods
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen Cheng, Xin-Kai Huang, Kuei-Hsiung Cho
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Abstract
In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
Claims20
A system, comprising:
- a top base having an opening therein, wherein the top base includes a slot to form a C-shape such that the top base is not completely annular;
- a bottom base;
- and
- a rod set comprising multiple rods connected to the bottom base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots.
1 more element
A vertical wafer vessel comprising:
- a top base having an opening therein, wherein the top base includes a slot to form a C-shape such that the top base is not completely annular;
- a bottom base;
- and
- a rod set comprising multiple rods connected to the bottom base, wherein each rod of the rod set comprises:
- multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a wafer, wherein each rod comprises a rear rod portion that is farthest from the wafer, a middle rod portion adjacent the rear rod portion, an oblique rod portion adjacent to the middle rod portion, an oblique finger portion, and an end finger portion that comprises the multiple fingers.
2 more elements
A method, comprising:
- inserting a wafer into a vertical wafer vessel, wherein the vertical wafer vessel comprises:
- a top base having an opening therein, wherein the top base includes a slot to form a C-shape such that the top base is not completely annular;
- a bottom base;
- and
- a rod set comprising multiple rods connected to the bottom base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other;
- inserting the vertical wafer vessel into a vertical thermal reaction chamber;
- and
- heating the vertical wafer vessel within the vertical thermal reaction chamber.
5 more elements
Dependencies are inferred from the claim text.