Container and method of preparing the same
AssigneeFujifilm Electronic Materials U.S.A., Inc.
InventorsMarcia Cole-Yocom, Bryan Hinzie
Life of this patent
Estimating the term…
Abstract
A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.
Claims18
A container for containing a raw material of a chemical liquid used for semiconductor manufacturing, the container comprising:
- an inner wall, constructed with a stainless steel material or coated with a resin material;
- and
- a solvent-treated surface of the inner wall, wherein the solvent-treated surface comes in contact with the raw material that includes a solvent having a content of iron (Fe) or calcium (Ca) atoms of 1 ppb or less and a content of organic impurities of 10 mass ppm or less during a course of being contained in the container,
- wherein the solvent-treated surface comprises a water-treated surface, which is configured by treating a surface of the inner wall with only deionized water, or
- wherein the solvent-treated surface comprises an organic solvent-treated surface, which is configured by treating a surface of the inner wall with only an organic solvent as the solvent included in the raw material, or
- wherein the solvent-treated surface comprises a water-organic solvent-treated surface, which is configured by treating a surface of the inner wall with only deionized water, followed by treating the surface of the inner wall with only an organic solvent as the solvent included in the raw material.
A method of preparing a container for containing a raw material of a chemical liquid, the method comprising:
- providing a container having an inner wall that is constructed with a stainless steel material or coated with a resin material;
- treating a surface of the inner wall with only water;
- and
- treating the surface of the inner wall with only an organic solvent, wherein the organic solvent includes a solvent included in the raw material.
Dependencies are inferred from the claim text.