Atomic oxygen and ozone device for cleaning and surface treatment

A system comprising:

• one or more service chambers and one or more atomic oxygen cleaning chambers coupled to a transfer chamber;
• and
• a robot housed in the transfer chamber used to transfer substrates between the one or more service chambers and the one or more atomic oxygen cleaning chambers, each of the one or more atomic oxygen cleaning chambers comprises:
• a chamber body having a gas inlet disposed in a first sidewall in the chamber body and a gas outlet disposed in a second sidewall in the chamber body, wherein the first sidewall and the second sidewall are on opposite sides of the chamber body;
• a chamber lid coupled to and disposed above the chamber body;
• a processing volume defined by the chamber body and an underside of the chamber lid, the gas inlet open to the processing volume;
• an ultraviolet (UV) radiation generator including one or more UV radiation sources disposed in the processing volume below the chamber lid;
• a pedestal disposed in the processing volume, the pedestal having a processing position corresponding to a distance from the UV radiation generator to an upper surface of the pedestal, the pedestal in the processing position is below the gas inlet;
• and
• a gas distribution assembly operable to distribute ozone laterally across the upper surface of the pedestal from the gas inlet of the chamber body laterally to the gas outlet of the chamber body, the one or more UV radiation sources disposed between the gas inlet and the underside of the chamber lid in the processing volume.