Ceramic susceptor

A ceramic susceptor comprising:

• an insulating plate on which a high-frequency electrode is disposed;
• a shaft having one end connected to the insulating plate and having a separation plate at the other end;
• a connection mount having an upper portion connected to the other end of the shaft;
• a first rod and a second rod connected to the high-frequency electrode and extending into the connection mount through the separation plate at the other end of the shaft;
• a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod;
• and
• a cooling structure configured to cool the connection mount;
• wherein the connection mount comprises a fixing plate configured to fix the draw-in rod, the draw-in rod passes through the fixing plate and is exposed outside through the connection mount,
• wherein the connection member includes a first hole and a second hole for fixing the first rod and the second rod to one side of the connection member, respectively, and a third hole for fixing the draw-in rod to the other side of the connection member,
• wherein the first rod and the second rod are for branching of an electric current, and
• wherein the fixing plate is provided in the inner space of the connection mount, and is spaced a predetermined distance from an upper part of the connection mount through which the first rod and the second rod pass, and a lower part of the connection mount through which the draw-in rod passes.