Plasma processing apparatus including predictive control

A plasma processing apparatus which performs plasma processing on a sample using a plasma, comprising:

• a processing chamber;
• a plasma generation device which generates the plasma in the processing chamber;
• and
• a control device which searches for an input parameter value of each control parameter of the apparatus which corresponds to a goal output parameter value of the sample and controls the plasma generation device to perform the plasma processing on the sample which is installed in the processing chamber on the basis of the searched-out input parameter value,
• wherein the control device
• learns a prediction model on the basis of learning data which is sets of predetermined input parameter values and output parameter values which are results of plasma processing performed on the sample on the basis of the predetermined input parameter values,
• sets a target output parameter value by interpolating values between the goal output parameter value and an output parameter value which is the closest to the goal output parameter value in the output parameter values in the learning data,
• estimates input parameter values which correspond to the goal output parameter value and the target output parameter value by using the prediction model,
• in a case where it is decided that the output parameter value which is the result of the plasma processing performed on the sample on the basis of the input parameter value which is estimated by using the prediction model and corresponds to the goal output parameter value converges to the goal output parameter value, controls the plasma generation device to perform the plasma processing on the sample on the basis of the input parameter value with which convergence thereof is decided, and
• in a case where it is decided that the output parameter value which is the result of the plasms processing performed on the sample on the basis of the input parameter value which is estimated by using the prediction model and corresponds to the goal output parameter value does not converge to the goal output parameter value, updates the prediction model by adding a set of the estimated input parameter value and the output parameter value which is the result of the plasma processing performed on the sample on the basis of the input parameter value to the learning data and resets the target output parameter value and thereby continues searching-for of an input parameter value which corresponds to the goal output parameter value.