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AssigneeHORIBA STEC, Co., Ltd.
InventorsKotaro Takijiri, Ojiro Takamune
Estimating the term…
Provided is a concentration control system that has only a small time delay, obtains accurate estimated values, and also enables partial pressure control having improved responsiveness and accuracy. The system includes a flow rate control device provided on a supply flow path that supplies gas to a chamber, and controls a flow rate of a gas in the supply flow path to match a set flow rate, a partial pressure measurement device for a gas inside the chamber, an observer having a model which estimates a state of the gas inside the chamber, where a flow rate of the gas flowing into the chamber and measured partial pressures are input into the model, and an estimated partial pressure of the gas within the chamber is output, and a controller that, based on a set partial pressure and on the estimated partial pressure, sets the set flow rate.
A concentration control system comprising:
A concentration control method that utilizes a concentration control system that comprises a flow rate control device that is provided on a supply flow path that supplies gas to an interior of a chamber, and performs control such that a flow rate of a gas flowing through this supply flow path matches a set flow rate that has been input, and a partial pressure measurement device that measures a partial pressure of a gas inside the chamber, in which
A program recording medium on which is recorded a program that is used in a concentration control system comprising:
Dependencies are inferred from the claim text.