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AssigneesASML Netherlands B.V., ASML Holding N.V.
InventorsDerk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard Jacobs, Andrew Judge, Veera Venkata Narasimha Narendra Phani Kottapalli, Joseph Harry Lyons, Theodorus Marinus Modderman, Manish Ranjan, Marcus Adrianus Van De Kerkhof, Xugang Xiong
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An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
An apparatus for determining a condition associated with a pellicle for use in a lithographic tool, the apparatus comprising a sensor configured to detect infrared radiation (IR) emitted from a region of the pellicle illuminated or arranged to be illuminated by the lithographic tool, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of a pellicle condition and to measure the pellicle when mounted in relation to an object it is designed to protect, wherein the sensor is configured to substantially avoid measurement of infrared radiation from the object and/or the apparatus is configured to determine the condition by substantially avoiding measurement of infrared radiation from the object.
A method of determining a condition associated with a pellicle for use in a lithographic apparatus, the method comprising detecting, using a sensor, infrared radiation (IR) emitted from a region of the pellicle illuminated or arranged to be illuminated by the lithographic tool while the pellicle is mounted in relation to an object it is designed to protect and measuring, based on the detected infrared radiation, a property associated with the pellicle, the property being indicative of the pellicle condition, wherein the sensor is configured to substantially avoid measurement of infrared radiation from the object and/or the condition associated with the pellicle is determined by substantially avoiding measurement of infrared radiation from the object.
Dependencies are inferred from the claim text.