Method of forming an hermetic seal on electronic and optoelectronic packages
AssigneePOET Technologies, Inc.
InventorsYee Loy Lam, Suresh Venkatesan, Long Cheng Koh
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AssigneePOET Technologies, Inc.
InventorsYee Loy Lam, Suresh Venkatesan, Long Cheng Koh
Estimating the term…
A method for forming hermetic seals between the cap and sub-mount for electronic and optoelectronic packages includes the formation of metal mounds on the sealing surfaces. Metal mounds, as precursors to a metal hermetic seal between the cap and sub-mount of a sub-mount assembly, facilitates the evacuation and purging of the volume created within cap and sub-mount assemblies prior to formation of the hermetic seal. The method is applied to discrete cap and sub-mount assemblies and also at the wafer level on singulated and non-singulated cap and sub-mount wafers. The method that includes the formation of the hermetic seal provides an inert environment for a plurality of electrical, optoelectrical, and optical die that are attached within an enclosed volume of the sub-mount assembly.
A method comprising
A method comprising
A method comprising
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