Method of fabricating diffraction gratings
AssigneeMagic Leap, Inc.
InventorsShuqiang Yang, Kang Luo, Vikramjit Singh, Frank Y. Xu
Life of this patent
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Abstract
A method of fabricating a blazed diffraction grating comprises providing a master template substrate and imprinting periodically repeating lines on the master template substrate in a plurality of master template regions. The periodically repeating lines in different ones of the master template regions extend in different directions. The method additionally comprises using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate.
Claims20
A method of fabricating a blazed diffraction grating, the method comprising:
- providing a master template substrate;
- imprinting periodically repeating lines on the master template substrate in a plurality of master template regions, wherein the periodically repeating lines in at least two of the master template regions extend in different radial directions with respect to an axis that is orthogonal to a surface of the master template substrate;
- and
- using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate,
- wherein the periodically repeating lines in adjacent ones of the master template regions extend in different directions that form an angle greater than zero and less than 90 degrees.
A method of fabricating a blazed diffraction grating, the method comprising:
- providing a primary master template comprising periodically repeating lines formed on a primary master substrate;
- providing a master template substrate;
- imprinting, using the primary master template, periodically repeating lines on the master template substrate in a plurality of master template regions, wherein the periodically repeating lines in at least two of the master template regions extend in different radial directions with respect to an axis that is orthogonal to a surface of the master template substrate;
- and
- using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate.
Dependencies are inferred from the claim text.